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13M061STPG - Collisions and Transport Processes in Ionized Gases

Course specification
Course title Collisions and Transport Processes in Ionized Gases
Acronym 13M061STPG
Study programme Electrical Engineering and Computing
Module Nanoelectronics and Photonics
Type of study master academic studies
Lecturer (for classes)
Lecturer/Associate (for practice)
Lecturer/Associate (for OTC)
    ESPB 6.0 Status elective
    Condition Passed exam: Electromagnetics or Physical electronics of gases and plasma
    The goal Introduction to the physical basis of plasma physics: atomic and molecular collisions and energy levels. Transport of charged particles in the ionized gas, by means of breakdown and by electric discharge in gases. Plasma modeling and applications.
    The outcome Knowledge of basic physics of atoms and molecules, collisions and transport in ionized gases, experimental techniques, and the gas discharge breakdown in gases. Knowledge of the possible technologies based on the use of plasma.
    Contents
    Contents of lectures Atomic and molecular energy levels, collisions of atomic particles, transport of charged particles, the Boltzmann equation and Monte Carlo simulations, fluid, hybrid and kinetic models of plasma breakdown in gases, plasma applications: etching, implantation, nitridation, nanotechnology.
    Contents of exercises Experiments and demonstrations: plasma sources, plasma treatment of materials, plasma simulations. Demonstrations and experiments will be carried out in the laboratories of the ETF and the Institute of Physics in accordance with the possibilities, especially a number of applications such as plasma treatment of polymers, textiles and metals will be demonstrated.
    Literature
    1. T. Makabe i Z. Lj. Petrović Plasma electronics, Taylor and francis 2007
    2. Principles of Plasma Discharges and Materials Processing, Michael A. Lieberman and Allan J. Lichtenberg, John Wiley and Sons, New York, 2005 Second Edition
    3. Raizer YP, Gas discharge physics, Springer-Verlag, Berlin, 1991
    Number of hours per week during the semester/trimester/year
    Lectures Exercises OTC Study and Research Other classes
    3 1
    Methods of teaching Lectures, discussions of literature, self-study and literature seminars, participation in demonstrations and laboratory exercises
    Knowledge score (maximum points 100)
    Pre obligations Points Final exam Points
    Activites during lectures 20 Test paper 0
    Practical lessons 20 Oral examination 50
    Projects
    Colloquia 0
    Seminars 10